Validating samples is a time consuming and expensive process when trying to track down defects and reasons for semiconductor failures. Optical microscopes were used to examine samples after each polishing stage, but they do not have the resolution to detect the small defects that are now being produced. With its small footprint, higher resolution and comparable price, the FEI Phenom personal electron microscope is the ideal alternative. It also offers faster sample analysis and imaging compared to many other scanning electron microscopes.
当试图追踪缺陷和半导体故障的原因时，验证样品是一个耗时且昂贵的过程。光学显微镜用于在每个抛光阶段后检查样品，但它们不具备检测现在产生的小缺陷的分辨率。 FEI Phenom 个人电子显微镜占地面积小、分辨率更高且价格相当，是理想的替代品。与许多其他扫描电子显微镜相比，它还提供更快的样品分析和成像。
With increasing demands and faster sample turn around required from from testing labs the FEI Phenom personal electron microscope is the ideal instrument for your lab. Bridging the gap between light microscopy and high end scanning electron microscopes, the FEI Phenom personal electron microscope features a compact desktop format, reasonable price, magnification range from 10 to 20,000 times and a resolution of 30nm. It also is extremely easy meaning anyone can use it, leading to rising productivity.
随着测试实验室的需求不断增加和样品周转速度加快，FEI Phenom 个人电子显微镜成为您实验室的理想仪器。 FEI Phenom 个人电子显微镜弥补了光学显微镜和高端扫描电子显微镜之间的差距，具有紧凑的台式结构、合理的价格、放大倍数范围为 10 至 20,000 倍以及分辨率为 30 nm。它也非常简单，意味着任何人都可以使用它，从而提高生产力。
Key Specifications 主要规格
- Magnification range 20 – 100,000x
放大倍数范围 20 – 100,000x - Long-lifetime high-brightness source (CeB6)
长寿命高亮度光源 (CeB 6 ) - 5 kV and 10 kV acceleration voltages for outstanding high-resolution SEM images
5 kV 和 10 kV 加速电压可实现出色的高分辨率 SEM 图像 - Sample loading in less than 30 seconds
样品加载时间不到 30 秒 - Full color Navigation Camera 20 – 120x magnification
全彩导航摄像机 20 – 120 倍放大倍率 - Ready to run all Pro Suite software applications
准备运行所有 Pro Suite 软件应用程序 - Very low energy consumption
能耗极低